Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Reticle thermal expansion calibration method capable of improving sub-recipe

Reticle thermal expansion calibration method capable of improving sub-recipe

US Patent 12216072 · Granted Feb 4, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cleaning process of wafer polishing pad and cleaning nozzle2025
Method for forming an epitaxial layer with better quality2025
Overlay mark2025
Semiconductor manufacturing process2025
Semiconductor manufacturing process2025
Semiconductor device and method for fabricating the same2025
Semiconductor cleaning step2025
Resistive memory device2025
Resistive random access memory and method of forming the same2025
Lithography film stack and lithography method2025
Lithography film stack and lithography method2025
Lithography film stack and lithography method2025