Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS resonator

MEMS resonator

US Patent 12184262 · Granted Dec 31, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microelectromechanical system resonator assembly2025
Spring-mass microelectromechanical resonator2025
Particle sensor2025
MEMS resonator with high quality factor and its use2025
MEMS resonator with high quality factor and its use2025
MEMS resonator array arrangement2024
Trapping and releasing particles carried by gas sample2024
MEMS resonator2023
MEMS resonator2023
Coupled MEMS resonator2023
Coupled MEMS resonator2021
Oven-controlled frequency reference oscillator and method of fabricating thereof2021