Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses

End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses

US Patent 12158705 · Granted Dec 3, 2024

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for acceleration or offloading utilizing a multiple input data2025
Offload command execution for data processing acceleration2025
Fluid purging system2025
Transparent block device compression using hash-table2025
Method and system for acceleration or offloading utilizing a unified data pointe2025
Rocking chair2025
Chair2025
Modem throughput throttling2025
Methods and patterning devices and apparatuses for measuring focus performance o2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Residual gas analyzer2025
Fluid purging system, projection system, illumination system, lithographic appar2025