Silicon oxide deposition method

Assignee

• Asm Ip Holding B.V.

Inventors

• Varun Sharma (77 patents)
• Daniele Chiappe (8 patents)
• Eva Tois (68 patents)
• Viraj Madhiwala (4 patents)
• Marko Tuominen (83 patents)
• Charles Dezelah (47 patents)
• Michael Eugene Givens (74 patents)
• Tom E. Blomberg (67 patents)

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