Semiconductor processing preclean methods and apparatus

Assignee

• Asm Ip Holding B.V.

Inventors

• Chuang Wei (8 patents)
• Aditya Chaudhury (1 patents)
• Prahlad Kulkarni (1 patents)
• Xing Lin (30 patents)
• Xiaoda Sun (2 patents)
• Woo-Jung Shin (16 patents)
• Bubesh Babu Jotheeswaran (2 patents)
• Fei Wang (240 patents)
• Qu Gary Jin (19 patents)
• Aditya Walimbe (3 patents)
• Rajeev Reddy Kosireddy (2 patents)
• YEN-CHUN FU (26 patents)
• Amin Azimi (1 patents)

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