Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma

Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma

US Patent 12014901 · Granted Jun 18, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for edge control during plasma processing2025
Apparatus for edge control during plasma processing2025
Non-intrusive method for 2D/3D mapping plasma parameters2025
Inductively coupled plasma source with radial coil network2025
Plasma processing apparatus with tunable electrical characteristic2025
Plasma processing apparatus with tunable electrical characteristic2025
Plasma processing with magnetic ring X point2025
Pulsed capacitively coupled plasma processes2025
Pulsed capacitively coupled plasma processes2025
Balanced RF resonant antenna system2025
Plasma processing methods using low frequency bias pulses2025
Plasma processing methods using low frequency bias pulses2025