Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cleaning chemical liquid supply device and cleaning chemical liquid supply method

Cleaning chemical liquid supply device and cleaning chemical liquid supply method

US Patent 11890652 · Granted Feb 6, 2024

Estimated economic value: $12,408,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chemical supply apparatus, cleaning system, and chemical supply method2025
Chemical supply apparatus, cleaning system, and chemical supply method2025
Liquid supplying device and method for draining liquid thereof2025
Liquid supplying device and method for draining liquid thereof2025
Apparatus for supplying liquid, cleaning unit, and apparatus for processing subs2024
Apparatus for supplying liquid, cleaning unit, and apparatus for processing subs2024
Jig and installation method using same jig2024
Cleaning liquid supply device, cleaning unit, and storage medium storing program2024
Damper control system and damper control method2024
Cleaning device, polishing device, and device and method for calculating rotatio2023
Substrate cleaning apparatus, substrate processing apparatus, and method of clea2022
Substrate processing apparatus, substrate processing method, substrate holding m2022