Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth) acrylic ester and production method therefor

Assignee

• Mitsubishi Chemical

Inventors

• Kazuaki Mukai (3 patents)
• Takeru Jo (2 patents)
• Yoshihiro Kamon (12 patents)
• Satoshi Sakuma (33 patents)
• Ryuichi Ansai (9 patents)

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