Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12384863 | Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth)acrylic ester and production method therefor | Takeru Jo, Yoshihiro Kamon, Satoshi Sakuma, Ryuichi Ansai | 2025-08-12 |
| 11845822 | Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth) acrylic ester and production method therefor | Takeru Jo, Yoshihiro Kamon, Satoshi Sakuma, Ryuichi Ansai | 2023-12-19 |
| 9223213 | Method of manufacturing polymer for lithography, method of manufacturing resist composition, and method of manufacturing substrate having pattern | Atsushi Yasuda | 2015-12-29 |