Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods for reflector film growth

Methods for reflector film growth

US Patent 11776980 · Granted Oct 3, 2023

Estimated economic value: $34,462,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Conformal molybdenum deposition2025
Method of tuning film properties of metal nitride using plasma2025
Low resistivity metal contact stack2025
Low resistivity metal contact stack2025
Methods and apparatus for seam reduction or elimination2025
Methods and apparatus for seam reduction or elimination2025
Polishing pad conditioning apparatus2025
Seamless gapfill of metal nitrides2025
Seamless gapfill of metal nitrides2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
Nucleation-free gap fill ALD process2025
Thermal process chamber lid with backside pumping2025