Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automatic wafer centering method and apparatus

Automatic wafer centering method and apparatus

US Patent 11764093 · Granted Sep 19, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate transport apparatus2025
Dual arm robot2025
Substrate processing apparatus2024
Substrate transport apparatus2024
Substrate transport apparatus with multiple movable arms utilizing a mechanical 2023
Process apparatus with on-the-fly substrate centering2023
Dual arm robot2023
Load lock fast pump vent2023
Substrate transport apparatus2023
Substrate processing apparatus2023
Automatic wafer centering method and apparatus2021
Automatic wafer centering method and apparatus2021