Coating apparatus and coating method

Assignee

• Tokyo Electron Limited

Inventors

• Hideki Kajiwara (17 patents)
• Yuya Yonemitsu (2 patents)
• Shinichiro YAMANAKA (2 patents)
• Shinichi MIZUSHINO (3 patents)
• Naruaki Iida (46 patents)
• Kohei Kawakami (10 patents)
• Tohru Azuma (3 patents)

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