Apparatuses for reducing metal residue in edge bead region from metal-containing resists

Assignee

• Inpria

Inventors

• Mollie Waller (3 patents)
• Brian J. Cardineau (31 patents)
• Kai-Li Jiang (637 patents)
• Alan J. Telecky (27 patents)
• Stephen T. Meyers (35 patents)
• Benjamin L. Clark (19 patents)

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