Organometallic photoresist developer compositions and processing methods

Assignee

• Inpria

Inventors

• Kai-Li Jiang (637 patents)
• Brian J. Cardineau (31 patents)
• Lauren B. McQuade (4 patents)
• Jeremy T. Anderson (39 patents)
• Stephen T. Meyers (35 patents)
• Michael Kocsis (14 patents)
• Amrit K. Narasimhan (3 patents)

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