Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Acoustic measurement of fabrication equipment clearance

Acoustic measurement of fabrication equipment clearance

US Patent 11709153 · Granted Jul 25, 2023

Estimated economic value: $19,670,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithography method with reduced impacts of mask defects2025
Method and device for cleaning substrates2025
Acoustic measurement of fabrication equipment clearance2025
Acoustic measurement of fabrication equipment clearance2025
Acoustic measurement of fabrication equipment clearance2025
Acoustic measurement of fabrication equipment clearance2025
Techniques for avoiding frequent handover in small cells2025
Portable confocal optical scanning microscopic device2025
Method and structures for acoustic wave overlay error determination2025
Particle removing assembly and method of cleaning mask for lithography2024
Multi-function overlay marks for reducing noise and extracting focus and critica2024
Method and device for cleaning substrates2024