Reactor for coating particles in stationary chamber with rotating paddles and gas injection

Assignee

• Applied Materials

Inventors

• Jonathan Frankel (32 patents)
• Colin C. Neikirk (17 patents)
• Pravin K. Narwankar (64 patents)
• Quoc Truong (25 patents)
• Govindraj Desai (8 patents)
• Sekar Krishnasamy (11 patents)
• Shrikant Swaminathan (2 patents)

View full patent text on Google Patents →