Paddle configuration for a particle coating reactor

Assignee

• Applied Materials

Inventors

• Govindraj Desai (8 patents)
• Sekar Krishnasamy (11 patents)
• Sumedh Acharya (13 patents)
• Dakshalkumar Patel (3 patents)
• Jonathan Frankel (32 patents)
• Quoc Truong (25 patents)
• Mario Cambron (1 patents)
• Ravindra Patil (5 patents)

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