Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pad conditioner cut rate monitoring

Pad conditioner cut rate monitoring

US Patent 11577362 · Granted Feb 14, 2023

Estimated economic value: $35,617,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control substrate polishing using constrained cost function2025
Edge synchronization systems and methods2025
Semiconductor fabrication using process control parameter matrix2025
Control of processing parameters during substrate polishing using cost function2025
Methods of modeling and controlling pad wear2025
Database replication using a resource management node2025
Residue measurement from machine learning based processing of substrate images2025
System using film thickness estimation from machine learning based processing of2024
Polishing system apparatus and methods for defect reduction at a substrate edge2024
Database replication for a remote deployment2024
Polishing articles and integrated system and methods for manufacturing chemical 2024
Techniques for combining CMP process tracking data with 3D printed CMP consumabl2024