{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Systems and methods for achieving peak ion energy enhancement with a low angular spread", "item": "https://www.patentleaderboard.com/patent/11569067"}]}
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Home › Systems and methods for achieving peak ion energy enhancement with a low angular spread

Systems and methods for achieving peak ion energy enhancement with a low angular spread

US Patent 11569067 · Granted Jan 31, 2023

Estimated economic value: $627,920,000 ⓘ

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