Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas delivery system for ion implanter

Gas delivery system for ion implanter

US Patent 11569062 · Granted Jan 31, 2023

Estimated economic value: $8,861,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Die stacking structure, semiconductor package and formation method of the die st2025
Repellent electrode for electron repelling2025
Calibration hardware for ion implanter2025
Insulator for an ion implantation source2024
Repellent electrode for electron repelling2023
Method of monitoring tool2023
Method of monitoring tool2023
Method of monitoring tool2023
Method and apparatus for reducing vacuum loss in an ion implantation system2023
Method and apparatus for reducing vacuum loss in an ion implantation system2023
Repellent electrode for electron repelling2022
Method and apparatus for reducing vacuum loss in an ion implantation system2022