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Home › In-situ annealing and etch back steps to improve exchange stiffness in cobalt iron boride based perpendicular magnetic anisotropy free layers

In-situ annealing and etch back steps to improve exchange stiffness in cobalt iron boride based perpendicular magnetic anisotropy free layers

US Patent 11527707 · Granted Dec 13, 2022

Estimated economic value: $8,590,000 ⓘ

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