Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › EUV radiation source apparatus for lithography

EUV radiation source apparatus for lithography

US Patent 11513441 · Granted Nov 29, 2022

Estimated economic value: $11,453,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV radiation source apparatus for lithography2025
EUV radiation source apparatus for lithography2025
Semiconductor processing tool and methods of operation2025
Fan and fan bracket2025
Semiconductor processing tool and methods of operation2025
Semiconductor processing tool and method of using the same2025
Lithography apparatus and method2025
Particle image velocimetry of extreme ultraviolet lithography systems2025
Particle image velocimetry of extreme ultraviolet lithography systems2025
Onsite cleaning system and method2025
Semiconductor processing tool and methods of operation2025
Semiconductor processing tool and methods of operation2025