Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices

Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices

US Patent 11409205 · Granted Aug 9, 2022

Estimated economic value: $75,747,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Single grab pupil landscape via broadband illumination2025
Single grab pupil landscape via broadband illumination2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
Scanning scatterometry overlay metrology2025
Scanning scatterometry overlay metrology2025
Scanning scatterometry overlay metrology2025
Predicting tool induced shift using Moiré overlay targets2025
Massive overlay metrology sampling with multiple measurement columns2025
In-situ process chamber chuck cleaning by cleaning substrate2025