Semiconductor substrate, semiconductor element and method for producing semiconductor substrate

Assignee

• Tamura
• Sicoxs
• National Institute Of Information And Communications Technology

Inventors

• Akito Kuramata (18 patents)
• Shinya Watanabe (194 patents)
• Kohei Sasaki (35 patents)
• Kuniaki Yagi (14 patents)
• Naoki Hatta (10 patents)
• Masataka Higashiwaki (13 patents)
• Keita KONISHI (2 patents)

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