Method of forming a flexible MEMS device

Assignee

• Qorvo Us

Inventors

• Robertus Petrus Van Kampen (40 patents)
• Lance W. Barron (18 patents)
• Mickael Renault (20 patents)
• Shibajyoti Ghosh Dastider (4 patents)
• Jacques Marcel Muyango (6 patents)
• Richard L. Knipe (56 patents)

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