Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma treatment method to enhance surface adhesion for lithography

Plasma treatment method to enhance surface adhesion for lithography

US Patent 11243465 · Granted Feb 8, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Technologies for fabricating a vertical DRAM structure2025
Selective film formation using a self-assembled monolayer2025
Point-of-use blending of rinse solutions for EUV processing to mitigate pattern 2025
Technologies for fabricating a 3D memory structure2025
Directed self-assembly2025
Fabricating three-dimensional semiconductor structures2025
Fabricating three-dimensional semiconductor structures2025
Methods for forming self-aligned contacts using spin-on silicon carbide2024
Stress relief in semiconductor wafers2024
Extreme ultraviolet lithography patterning method2024
Point-of-use blending of rinse solutions to mitigate pattern collapse2023
Methods for forming self-aligned contacts using spin-on silicon carbide2022