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Home › Interconnect structures with cobalt-infused ruthenium liner and a cobalt cap

Interconnect structures with cobalt-infused ruthenium liner and a cobalt cap

US Patent 11158538 · Granted Oct 26, 2021

Estimated economic value: $2,874,000 ⓘ

Assignee

IBM

Inventors

Joseph F. Maniscalco (30 patents)
Koichi Motoyama (118 patents)
Oscar van der Straten (143 patents)
Scott A. DeVries (4 patents)
Alexander Reznicek (1,290 patents)

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