Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas supply device, gas supply method and film forming method

Gas supply device, gas supply method and film forming method

US Patent 11155923 · Granted Oct 26, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for forming ruthenium silicide film on surface of substrate2025
Substrate processing method and film forming system2024
Deposition method and deposition apparatus2024
Raw material supply apparatus and film forming apparatus2024
Tungsten film-forming method, film-forming system and storage medium2023
Flow rate control method, flow rate control device, and film forming apparatus2023
Method of forming tungsten film and controller2023
Film forming method and film forming system2022
Method of processing substrate2022
Film forming method and substrate processing system2021
Method of forming film2021
Tungsten film-forming method, film-forming system and storage medium2021