MEMS-sensor

Assignee

• Infineon Technologies Ag

Inventors

• Gunar Lorenz (13 patents)
• Alfons Dehe (159 patents)
• Marc Fueldner (38 patents)
• Bernd Goller (32 patents)
• Ulrich Krumbein (36 patents)
• Andreas Wiesbauer (160 patents)

View full patent text on Google Patents →