Electromagnetic shielding metal-insulator-metal capacitor structure

Assignee

• TSMC

Inventors

• Hui Yu Lee (73 patents)
• Chin-Chou Liu (87 patents)
• Cheng-Hung Yeh (19 patents)
• Fong-Yuan Chang (135 patents)
• Po-Hsiang Huang (130 patents)
• Yi-Kan Cheng (120 patents)
• Ka Fai Chang (14 patents)

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