Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stress reduction during laser resealing through a temperature increase

Stress reduction during laser resealing through a temperature increase

US Patent 11084716 · Granted Aug 10, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for sealing entries in a MEMS element2023
Sensor element having laser-activated getter material2020
MEMS component having two different internal pressures2020
Laser resealing with stress-reducing prestructuring2020
Laser resealing with stress-reducing prestructuring2020
Laser reseal including optimized intensity distribution2019
Laser reseal including optimized intensity distribution2019
Laser reseal including a protective structure2019
Micromechanical component including a diffusion stop channel2018
Structures for reducing and avoiding stresses on the seal bottom side during las2018
Structures for reducing and preventing stress and tensions during processing of 2018
Structures for reducing and preventing stress and tensions during processing of 2018