Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Buffer unit, and apparatus for treating substrate with the unit

Buffer unit, and apparatus for treating substrate with the unit

US Patent 11056367 · Granted Jul 6, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrostatic chuck, substrate processing apparatus, and substrate processing me2025
Plasma processing apparatus2025
Container and substrate treating apparatus2024
Apparatus and method for treating substrate2024
Apparatus and method for processing substrate2023
Substrate processing system including electrostatic chuck and method for manufac2023
Substrate transfer apparatus and substrate treating apparatus2023
Buffer unit, and apparatus and method for treating substrate with the unit2023
Electrostatic chuck and electrostatic chuck apparatus including the same2022
Apparatus and method for treating substrate2022
Substrate treating apparatus and substrate treating method2022
Substrate treating apparatus, substrate support unit, and substrate treating met2021