Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient

Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient

US Patent 11009345 · Granted May 18, 2021

Estimated economic value: $75,541,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate, patterning device and metrology apparatuses2025
Metrology apparatus and method for determining a characteristic of one or more s2024
Metrology method and associated computer product2024
Methods and apparatus for monitoring a manufacturing process, inspection apparat2023
Metrology parameter determination and metrology recipe selection2022
Method of determining a value of a parameter of interest of a patterning process2021
Method of measuring a structure, inspection apparatus, lithographic system and d2021
Metrology parameter determination and metrology recipe selection2021
Metrology method, apparatus and computer program2020
Metrology method and apparatus, computer program and lithographic system2020
Metrology method and apparatus, computer program and lithographic system2020
Metrology method and apparatus and associated computer product2020