Recessed STI as the gate dielectric of HV device

Assignee

• TSMC

Inventors

• Yi-Huan Chen (55 patents)
• Kong-Beng Thei (223 patents)
• Fu-Jier Fan (49 patents)
• Ker Hsiao Huo (42 patents)
• Kau-Chu Lin (5 patents)
• Li-Hsuan Yeh (5 patents)
• Szu-Hsien Liu (19 patents)
• Yi-Sheng Chen (36 patents)

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