Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deposition apparatus and physical vapor deposition chamber

Deposition apparatus and physical vapor deposition chamber

US Patent 10984994 · Granted Apr 20, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for identification of fetal cross-sections based on ultraso2025
Array substrate and display device2025
Method for manufacturing display panel, display panel and to-be-cut display pane2025
Matte ceramic tile and preparation method thereof2025
Coil structure and plasma processing apparatus2025
Extrusion head for molding pole piece and molding device comprising same, and mo2025
Standing coke-making furnace and coke-making system2025
Sacrificial capping layer for gate protection2025
Multi-active area semiconductor structure and method for manufacturing same2025
Method for preparing shell-bionic ceramic tool and shell-bionic ceramic tool2025
Coil structure for generating plasma and semiconductor equipment2025
Monocrystalline silicon micro-nano dual-scale anti-reflection texture and prepar2025