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Home › Methods and apparatus for three-dimensional NAND structure fabrication

Methods and apparatus for three-dimensional NAND structure fabrication

US Patent 10964717 · Granted Mar 30, 2021

Estimated economic value: $120,425,000 ⓘ

Assignee

Applied Materials

Inventors

Sung-Kwan Kang (27 patents)
Gill Yong Lee (47 patents)
Chang-Seok Kang (76 patents)
Tomohiko Kitajima (30 patents)

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