Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same

Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same

US Patent 10941490 · Granted Mar 9, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Showerhead assembly for distributing a gas within a reaction chamber2025
Semiconductor processing apparatus and methods for monitoring and controlling a 2025
Temperature controlled substrate carrier and polishing components2025
Containment and exhaust system for substrate polishing components2024
Apparatus for detecting or monitoring for a chemical precursor in a high tempera2024
Systems and methods for controlling vapor phase processing2024
Multiple temperature range susceptor, assembly, reactor and system including the2023
Semiconductor processing apparatus comprising one or more pyrometers for measuri2023
Apparatus and methods for isolating a reaction chamber from a loading chamber re2023
Apparatus for detecting or monitoring for a chemical precursor in a high tempera2021
Apparatus for semiconductor wafer processing2021
Apparatus and methods for isolating a reaction chamber from a loading chamber re2020