Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tunable upper plasma-exclusion-zone ring for a bevel etcher

Tunable upper plasma-exclusion-zone ring for a bevel etcher

US Patent 10937634 · Granted Mar 2, 2021

Estimated economic value: $809,468,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lower plasma exclusion zone ring for bevel etcher2025
Lower plasma exclusion zone ring for bevel etcher2025
In-situ wafer thickness and gap monitoring using through beam laser sensor2025
Tunable upper plasma-exclusion-zone ring for a bevel etcher2023
Tunable upper plasma-exclusion-zone ring for a bevel etcher2023
Tunable upper plasma-exclusion-zone ring for a bevel etcher2023
Electric vehicle drive system and operation method of the same2021
Human powered watercraft or land vehicle2020
Bushy joins to improve computer efficiency executing queries2020
Human powered watercraft or land vehicle2019
Back side deposition apparatus and applications2018
Method and apparatus for shaping a gas profile near bevel edge2017