Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756771 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Jack Chen, Gregory Sexton | 2023-09-12 |
| 10937634 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Jack Chen, Gregory Sexton | 2021-03-02 |