Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chamber component part wear indicator and a system for detecting part wear

Chamber component part wear indicator and a system for detecting part wear

US Patent 10921251 · Granted Feb 16, 2021

Estimated economic value: $36,444,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection of aluminum process chamber components2023
Protection of aluminum process chamber components2023
Method for fabricating chamber parts2023
Method for fabricating chamber parts2023
Protective layers for processing chamber components2022
Protective layers for processing chamber components2022
Projectile with selectable angle of attack2022
Method for forming a protective coating film for halide plasma resistance2021
Protective yttria coating for semiconductor equipment parts2021
Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to d2021
Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to d2021
Coating tester using gas sensors2021