{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Plasma health determination in semiconductor substrate processing reactors", "item": "https://www.patentleaderboard.com/patent/10920320"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma health determination in semiconductor substrate processing reactors

Plasma health determination in semiconductor substrate processing reactors

US Patent 10920320 · Granted Feb 16, 2021

Estimated economic value: $36,444,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme uniformity heated substrate support assembly2025
Storage system and method of data management of the same2025
Electronic control of protection parameters for a semiconductor switch2025
Display device using micro LED and method for manufacturing same2025
Ion extraction optics having non uniform grid assembly2025
System for mutual inductance cancellation for X-type multilevel converters2025
Using a multilevel neutral point clamped inverter2025
Low parasitic equivalent series L-inductance (ESL) symmetric direct current (DC)2025
Multilevel direct current power source powering multilevel inverter2025
System architecture of manufacturing of semiconductor wafers2025
Display device using micro LED and method of manufacturing same2025
Electronic device and method for measuring voltage of battery in electronic devi2025