Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems

Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems

US Patent 10916451 · Granted Feb 9, 2021

Estimated economic value: $118,884,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems of optical inspection of electronic device manufacturing mac2025
Centerfinding for a process kit or process kit carrier at a manufacturing system2023
Loadlock integrated bevel etcher system2021
Loadlock integrated bevel etcher system2020
Substrate deposition systems, robot transfer apparatus, and methods for electron2019
Loadlock integrated bevel etcher system2019
Systems and methods of gap calibration via direct component contact in electroni2019
Systems and methods of gap calibration via direct component contact in electroni2019
Methods and systems providing misalignment correction in robots2018
Wafer handling systems and methods2016
Method and apparatus for robot calibrations with a calibrating device2014
Method and apparatus for robot calibrations with a calibrating device2012