Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber

Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber

US Patent 10910253 · Granted Feb 2, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Magnetic integrated lift pin system for a chemical processing chamber2023
Magnetic integrated lift pin system for a chemical processing chamber2023
Wafer edge lift pin design for manufacturing a semiconductor device2019
Compact image intensifier objective with gradient index lenses2019
Composite graded-index fiber mode field adaptor for high-aspect-ratio core optic2019
Systems and methods for metering a dose volume of fluid used to treat microelect2018
Processing system and method for providing a heated etching solution2018
Processing system and method for providing a heated etching solution2017
Optical force based biomolecular analysis in slot waveguides2016
Sterile drapes for X-ray devices, systems containing the same, and methods for u2016
Anamorphic eyepiece with a microlens array for a panoramic field of view2015
Optical component design for silicon optical bench2012