Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-plate faceplate for a processing chamber

Multi-plate faceplate for a processing chamber

US Patent 10811232 · Granted Oct 20, 2020

Estimated economic value: $40,793,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Memory device with global and local latches2025
Multi-zone gas distribution systems and methods2024
Wafer dicing using femtosecond-based laser and plasma etch2024
Two piece electrode assembly with gap for plasma control2024
Ceramic showerheads with conductive electrodes2023
Methods and systems to enhance process uniformity2023
Wafer dicing using femtosecond-based laser and plasma etch2023
Ceramic showerheads with conductive electrodes2023
Multi-zone gas distribution systems and methods2023
Chamber apparatus for chemical etching of dielectric materials2022
Methods and systems to enhance process uniformity2022
Ceramic showerheads with conductive electrodes2021