Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System comprising a single wafer, reduced volume process chamber

System comprising a single wafer, reduced volume process chamber

US Patent 10770338 · Granted Sep 8, 2020

Estimated economic value: $79,748,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor wafer processing system2023
Semiconductor wafer processing system2023
High-pressure anneal2017
High-pressure anneal2017
Method for backside-contacting a silicon solar cell, silicon solar cell and sili2016