Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769673 | Semiconductor wafer processing system | Wieland Pethe | 2023-09-26 |
| 10770338 | System comprising a single wafer, reduced volume process chamber | Wieland Pethe | 2020-09-08 |
| 9646850 | High-pressure anneal | Wieland Pethe, Bernd Kallauch | 2017-05-09 |