Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769673 | Semiconductor wafer processing system | Dirk Noack | 2023-09-26 |
| 10770338 | System comprising a single wafer, reduced volume process chamber | Dirk Noack | 2020-09-08 |
| 9646850 | High-pressure anneal | Dirk Noack, Bernd Kallauch | 2017-05-09 |
| 9252300 | Method for backside-contacting a silicon solar cell, silicon solar cell and silicon solar module | Harald Hahn, Kristian Schlegel, Torsten Weber, Martin Kutzer | 2016-02-02 |