Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

US Patent 10770324 · Granted Sep 8, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method, control device and vacuum arrangement2023
Coating processes for vacuum chamber arrangements and apparatus thereof2023
Coating processes for vacuum chamber arrangements and apparatus thereof2023
Vacuum chamber arrangement and method for processing a substrate2022
Substrate treatment installation2015
Transporting device, in particular for transporting sheet-like substrates throug2014
Transport device, in particular for transporting sheet-like substrates through a2012
Sluice system for a vacuum facility2012
Elongate vacuum system for coating one or both sides of a flat substrate2010