Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Segmenting a model within a plasma system

Segmenting a model within a plasma system

US Patent 10762266 · Granted Sep 1, 2020

Estimated economic value: $45,225,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for controlling plasma in a plasma processing system2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025
Sensor data compression in a plasma tool2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2024
Systems and methods for tuning a MHz RF generator within a cycle of operation of2024
Methods and apparatus for controlling plasma in a plasma processing system2023
Adjustment of power and frequency based on three or more states2022
Using modeling for identifying a location of a fault in an RF transmission syste2021
Systems and methods for reducing power reflected towards a higher frequency RF g2021
Systems and methods for reducing power reflected towards a higher frequency RF g2021
Systems and methods for tuning an impedance matching network in a step-wise fash2020