Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Simplified particle emitter and method of operating thereof

Simplified particle emitter and method of operating thereof

US Patent 10699867 · Granted Jun 30, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for inspecting a specimen and charged particle beam device2025
Secondary charged particle imaging system2021
Charged particle beam device, objective lens module, electrode device, and metho2021
Method of operating a charged particle beam specimen inspection system2019
Device and method for forming a plurality of charged particle beamlets2019
Method for inspecting a specimen and charged particle multi-beam device2019
Method of reducing coma and chromatic aberration in a charged particle beam devi2019
On-axis illumination and alignment for charge control during charged particle be2019
System and method for imaging a secondary charged particle beam with adaptive se2018
Charged particle beam specimen inspection system and method for operation thereo2018
Multi-beam lens device, charged particle beam device, and method of operating a 2018
System for imaging a secondary charged particle beam with adaptive secondary cha2018